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Page history last edited by Robert Baker 13 years ago

Start Up Procedure for Plasma Chamber:

1. Check  make sure pumps are working correctly

2. Pressure should be ~10^-6 torr,

3. Make sure filament on ion gauge is off

4. Open valve to He or Ar tank  (below 40 mtorr)

5. Turn on Water Cooler for RF generator and antenna

6. Turn on RF source ( ? volts)

7. Turn on B Field if necessary

 

Collecting Data

Frequency of data acquisition( sampling rate ) should be at least twice the frequency of the signal you are collecting to removing error due to aliasing

 

 

 

 

Shut off Procedure:

1. Turn off B Field (if it was on)

2. Turn off RF source

3. Water Cooler Off

4. Close the pressure valve to He or Ar tank (clockwise is off)

 

 

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